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Issue:
RMAN-10035: exception raised in RPC: ORA-19504: failed to create file “/u94/oradata/msctest/bomd02.dbf”
ORA-27044: unable to write the header block of file
HP-UX Error: 27: File too large

or

ORA-01237: cannot extend datafile 222
ORA-01110: data file 222: ‘/u95/oradata/mscprod/invdl412.dbf’
ORA-27059: skgfrsz: could not reduce file size
HP-UX Error: 27: File too large
Additional information: 1

Check if large files are supported:
# fsadm -F vxfs /u94
nolargefiles

Fix:
# fsadm -F vxfs -o largefiles /dev/vg05/u94

# fsadm -F vxfs /u94
largefiles

Add largefiles option to the list of vxfs options in /etc/fstab:
dev/vg08/u94 /u94 vxfs delaylog,largefiles 0 2

You may need to remount the filesystem if is not an Online JFS or VxFS.